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00000nam a2200000 i 4500 |
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UV# |
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20230628092706.0 |
| 008 |
180110s2010 nyua b 1 eng d |
| 999 |
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|c 315936
|d 315935
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| 020 |
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|a 9781461427360
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| 040 |
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|a UNAMX
|b spa
|c UNAMX
|d UV#
|e rda
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| 050 |
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4 |
|a TK7875
|b H37 2010
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| 082 |
|
4 |
|a 621.381
|2 70
|
| 100 |
1 |
|
|a Hartzell, Allyson L.,
|e autor
|
| 245 |
1 |
0 |
|a MEMS reliability
|c / Allyson L. Hartzell, Mark G. da Silva, Herbert R. Shea ; foreword by Stephen D. Senturia.
|
| 250 |
|
|
|a 1st edition.
|
| 264 |
|
1 |
|a New York :
|b Springer,
|c 2010
|
| 264 |
|
4 |
|c ©2010.
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| 300 |
|
|
|a xiii, 291 páginas :
|b ilustraciones ;
|c 24 cm.
|
| 336 |
|
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|a texto
|2 rdacontent
|
| 337 |
|
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|a sin medio
|2 rdamedia
|
| 338 |
|
|
|a volumen
|2 rdacarrier
|
| 490 |
0 |
|
|a Mems reference shelf
|
| 504 |
|
|
|a Incluye bibliografías e índice.
|
| 650 |
|
7 |
|a Sistemas microelectromecánicos
|9 356663
|
| 700 |
1 |
|
|a Senturia, Stephen D.,
|e prologuista
|
| 700 |
1 |
|
|a Da Silva, Mark G.,
|e autor
|
| 700 |
1 |
|
|a Shea, Herbert R.,
|e autor
|
| 942 |
|
|
|c LIBRO
|2 lcc
|
