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MEMS reliability

Detalles Bibliográficos
Autor principal:	Hartzell, Allyson L. (autor)
Otros Autores:	Senturia, Stephen D. (prologuista), Da Silva, Mark G. (autor), Shea, Herbert R. (autor)
Formato:	Libro
Lenguaje:	English
Publicado:	New York : Springer, 2010
Edición:	1st edition.
Colección:	Mems reference shelf
Materias:	Sistemas microelectromecánicos

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