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Sputtering by particle bombardment
| Autores principales: | , , , , |
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| Lenguaje: | eng |
| Publicado: |
Springer
1981
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/3-540-10521-2 http://cds.cern.ch/record/100399 |
| _version_ | 1780876375671963648 |
|---|---|
| author | Andersen, Hans Henrik Bay, H L Roosendaal, H E Taylor-Robinson, M M Behrisch, Rainer |
| author_facet | Andersen, Hans Henrik Bay, H L Roosendaal, H E Taylor-Robinson, M M Behrisch, Rainer |
| author_sort | Andersen, Hans Henrik |
| collection | CERN |
| id | cern-100399 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1981 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-1003992021-04-22T06:17:23Zdoi:10.1007/3-540-10521-2http://cds.cern.ch/record/100399engAndersen, Hans HenrikBay, H LRoosendaal, H ETaylor-Robinson, M MBehrisch, RainerSputtering by particle bombardmentEngineeringSpringeroai:cds.cern.ch:1003991981 |
| spellingShingle | Engineering Andersen, Hans Henrik Bay, H L Roosendaal, H E Taylor-Robinson, M M Behrisch, Rainer Sputtering by particle bombardment |
| title | Sputtering by particle bombardment |
| title_full | Sputtering by particle bombardment |
| title_fullStr | Sputtering by particle bombardment |
| title_full_unstemmed | Sputtering by particle bombardment |
| title_short | Sputtering by particle bombardment |
| title_sort | sputtering by particle bombardment |
| topic | Engineering |
| url | https://dx.doi.org/10.1007/3-540-10521-2 http://cds.cern.ch/record/100399 |
| work_keys_str_mv | AT andersenhanshenrik sputteringbyparticlebombardment AT bayhl sputteringbyparticlebombardment AT roosendaalhe sputteringbyparticlebombardment AT taylorrobinsonmm sputteringbyparticlebombardment AT behrischrainer sputteringbyparticlebombardment |