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Sputtering by particle bombardment

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Detalles Bibliográficos
Autores principales:	Andersen, Hans Henrik, Bay, H L, Roosendaal, H E, Taylor-Robinson, M M, Behrisch, Rainer
Lenguaje:	eng
Publicado:	Springer 1981
Materias:	Engineering
Acceso en línea:	https://dx.doi.org/10.1007/3-540-10521-2 http://cds.cern.ch/record/100399

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