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16th International Conference on Ion Implantation Technology
Autores principales: | , , , |
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Lenguaje: | eng |
Publicado: |
AIP
2006
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/1005784 |
_version_ | 1780911746058289152 |
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author | Kirkby, Karen J Gwilliam, Russell M Smith, Andrew J Chivers, David |
author_facet | Kirkby, Karen J Gwilliam, Russell M Smith, Andrew J Chivers, David |
author_sort | Kirkby, Karen J |
collection | CERN |
id | cern-1005784 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 2006 |
publisher | AIP |
record_format | invenio |
spelling | cern-10057842021-07-30T13:17:13Zhttp://cds.cern.ch/record/1005784engKirkby, Karen JGwilliam, Russell MSmith, Andrew JChivers, David16th International Conference on Ion Implantation TechnologyXXAIPoai:cds.cern.ch:10057842006 |
spellingShingle | XX Kirkby, Karen J Gwilliam, Russell M Smith, Andrew J Chivers, David 16th International Conference on Ion Implantation Technology |
title | 16th International Conference on Ion Implantation Technology |
title_full | 16th International Conference on Ion Implantation Technology |
title_fullStr | 16th International Conference on Ion Implantation Technology |
title_full_unstemmed | 16th International Conference on Ion Implantation Technology |
title_short | 16th International Conference on Ion Implantation Technology |
title_sort | 16th international conference on ion implantation technology |
topic | XX |
url | http://cds.cern.ch/record/1005784 |
work_keys_str_mv | AT kirkbykarenj 16thinternationalconferenceonionimplantationtechnology AT gwilliamrussellm 16thinternationalconferenceonionimplantationtechnology AT smithandrewj 16thinternationalconferenceonionimplantationtechnology AT chiversdavid 16thinternationalconferenceonionimplantationtechnology |