Cargando…
Fine line lithography
| Autor principal: | |
|---|---|
| Lenguaje: | eng |
| Publicado: |
North-Holland
1980
|
| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/100913 |
| _version_ | 1780876456779317248 |
|---|---|
| author | Newman, Robert |
| author_facet | Newman, Robert |
| author_sort | Newman, Robert |
| collection | CERN |
| id | cern-100913 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1980 |
| publisher | North-Holland |
| record_format | invenio |
| spelling | cern-1009132021-04-22T06:14:48Zhttp://cds.cern.ch/record/100913engNewman, RobertFine line lithographyEngineeringNorth-Hollandoai:cds.cern.ch:1009131980 |
| spellingShingle | Engineering Newman, Robert Fine line lithography |
| title | Fine line lithography |
| title_full | Fine line lithography |
| title_fullStr | Fine line lithography |
| title_full_unstemmed | Fine line lithography |
| title_short | Fine line lithography |
| title_sort | fine line lithography |
| topic | Engineering |
| url | http://cds.cern.ch/record/100913 |
| work_keys_str_mv | AT newmanrobert finelinelithography |