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Thin film processes

Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the p...

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Detalles Bibliográficos
Autores principales: Werner, Kern, Vossen, John L
Lenguaje:eng
Publicado: Academic Press 1978
Materias:
Acceso en línea:http://cds.cern.ch/record/101060
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author Werner, Kern
Vossen, John L
author_facet Werner, Kern
Vossen, John L
author_sort Werner, Kern
collection CERN
description Remarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process.
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institution Organización Europea para la Investigación Nuclear
language eng
publishDate 1978
publisher Academic Press
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spelling cern-1010602021-04-22T06:13:52Zhttp://cds.cern.ch/record/101060engWerner, KernVossen, John LThin film processesOther Fields of PhysicsRemarkable advances have been made in recent years in the science and technology of thin film processes for deposition and etching. It is the purpose of this book to bring together tutorial reviews of selected filmdeposition and etching processes from a process viewpoint. Emphasis is placed on the practical use of the processes to provide working guidelines for their implementation, a guide to the literature, and an overview of each process.Academic Pressoai:cds.cern.ch:1010601978
spellingShingle Other Fields of Physics
Werner, Kern
Vossen, John L
Thin film processes
title Thin film processes
title_full Thin film processes
title_fullStr Thin film processes
title_full_unstemmed Thin film processes
title_short Thin film processes
title_sort thin film processes
topic Other Fields of Physics
url http://cds.cern.ch/record/101060
work_keys_str_mv AT wernerkern thinfilmprocesses
AT vossenjohnl thinfilmprocesses