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Sputtering by particle bombardment
| Autores principales: | , , , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Springer
1983
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/3-540-12593-0 http://cds.cern.ch/record/101577 |
| _version_ | 1780876559598485504 |
|---|---|
| author | Betz, G Carter, George Navinsek, B Behrisch, Rainer |
| author_facet | Betz, G Carter, George Navinsek, B Behrisch, Rainer |
| author_sort | Betz, G |
| collection | CERN |
| id | cern-101577 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1983 |
| publisher | Springer |
| record_format | invenio |
| spelling | cern-1015772021-04-22T06:10:47Zdoi:10.1007/3-540-12593-0http://cds.cern.ch/record/101577engBetz, GCarter, GeorgeNavinsek, BBehrisch, RainerSputtering by particle bombardmentEngineeringSpringeroai:cds.cern.ch:1015771983 |
| spellingShingle | Engineering Betz, G Carter, George Navinsek, B Behrisch, Rainer Sputtering by particle bombardment |
| title | Sputtering by particle bombardment |
| title_full | Sputtering by particle bombardment |
| title_fullStr | Sputtering by particle bombardment |
| title_full_unstemmed | Sputtering by particle bombardment |
| title_short | Sputtering by particle bombardment |
| title_sort | sputtering by particle bombardment |
| topic | Engineering |
| url | https://dx.doi.org/10.1007/3-540-12593-0 http://cds.cern.ch/record/101577 |
| work_keys_str_mv | AT betzg sputteringbyparticlebombardment AT cartergeorge sputteringbyparticlebombardment AT navinsekb sputteringbyparticlebombardment AT behrischrainer sputteringbyparticlebombardment |