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Sputtering by particle bombardment

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Detalles Bibliográficos
Autores principales:	Betz, G, Carter, George, Navinsek, B, Behrisch, Rainer
Lenguaje:	eng
Publicado:	Springer 1983
Materias:	Engineering
Acceso en línea:	https://dx.doi.org/10.1007/3-540-12593-0 http://cds.cern.ch/record/101577

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