Investigation of voltages and electric fields in silicon semi 3D radiation detectors using Silvaco/ATLAS simulation tool and a scanning electron microscope

The structure of silicon semi three-dimensional radiation detector is simulated on purpose to find out its electrical characteristics such as the depletion voltage and electric field. Two-dimensional simulation results are compared to voltage and electric field measurements done by a scanning electr...

Descripción completa

Detalles Bibliográficos
Autores principales: Palviainen, T, Leinonen, K, Tuuva, T, Eranen, S, Härkönen, J, Luukka, P, Tuovinen, E
Lenguaje:eng
Publicado: 2006
Materias:
Detectors and Experimental Techniques
Acceso en línea:http://cds.cern.ch/record/1020040
_version_ 1780912080900063232
author Palviainen, T
Leinonen, K
Tuuva, T
Eranen, S
Härkönen, J
Luukka, P
Tuovinen, E
author_facet Palviainen, T
Leinonen, K
Tuuva, T
Eranen, S
Härkönen, J
Luukka, P
Tuovinen, E
author_sort Palviainen, T
collection CERN
description The structure of silicon semi three-dimensional radiation detector is simulated on purpose to find out its electrical characteristics such as the depletion voltage and electric field. Two-dimensional simulation results are compared to voltage and electric field measurements done by a scanning electron microscope.
id cern-1020040
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2006
record_format invenio
spelling cern-10200402019-09-30T06:29:59Zhttp://cds.cern.ch/record/1020040engPalviainen, TLeinonen, KTuuva, TEranen, SHärkönen, JLuukka, PTuovinen, EInvestigation of voltages and electric fields in silicon semi 3D radiation detectors using Silvaco/ATLAS simulation tool and a scanning electron microscopeDetectors and Experimental TechniquesThe structure of silicon semi three-dimensional radiation detector is simulated on purpose to find out its electrical characteristics such as the depletion voltage and electric field. Two-dimensional simulation results are compared to voltage and electric field measurements done by a scanning electron microscope.oai:cds.cern.ch:10200402006
spellingShingle Detectors and Experimental Techniques
Palviainen, T
Leinonen, K
Tuuva, T
Eranen, S
Härkönen, J
Luukka, P
Tuovinen, E
Investigation of voltages and electric fields in silicon semi 3D radiation detectors using Silvaco/ATLAS simulation tool and a scanning electron microscope
title Investigation of voltages and electric fields in silicon semi 3D radiation detectors using Silvaco/ATLAS simulation tool and a scanning electron microscope
title_full Investigation of voltages and electric fields in silicon semi 3D radiation detectors using Silvaco/ATLAS simulation tool and a scanning electron microscope
title_fullStr Investigation of voltages and electric fields in silicon semi 3D radiation detectors using Silvaco/ATLAS simulation tool and a scanning electron microscope
title_full_unstemmed Investigation of voltages and electric fields in silicon semi 3D radiation detectors using Silvaco/ATLAS simulation tool and a scanning electron microscope
title_short Investigation of voltages and electric fields in silicon semi 3D radiation detectors using Silvaco/ATLAS simulation tool and a scanning electron microscope
title_sort investigation of voltages and electric fields in silicon semi 3d radiation detectors using silvaco/atlas simulation tool and a scanning electron microscope
topic Detectors and Experimental Techniques
url http://cds.cern.ch/record/1020040
work_keys_str_mv AT palviainent investigationofvoltagesandelectricfieldsinsiliconsemi3dradiationdetectorsusingsilvacoatlassimulationtoolandascanningelectronmicroscope
AT leinonenk investigationofvoltagesandelectricfieldsinsiliconsemi3dradiationdetectorsusingsilvacoatlassimulationtoolandascanningelectronmicroscope
AT tuuvat investigationofvoltagesandelectricfieldsinsiliconsemi3dradiationdetectorsusingsilvacoatlassimulationtoolandascanningelectronmicroscope
AT eranens investigationofvoltagesandelectricfieldsinsiliconsemi3dradiationdetectorsusingsilvacoatlassimulationtoolandascanningelectronmicroscope
AT harkonenj investigationofvoltagesandelectricfieldsinsiliconsemi3dradiationdetectorsusingsilvacoatlassimulationtoolandascanningelectronmicroscope
AT luukkap investigationofvoltagesandelectricfieldsinsiliconsemi3dradiationdetectorsusingsilvacoatlassimulationtoolandascanningelectronmicroscope
AT tuovinene investigationofvoltagesandelectricfieldsinsiliconsemi3dradiationdetectorsusingsilvacoatlassimulationtoolandascanningelectronmicroscope

Ejemplares similares