Gauges for fine and high vacuum

Vacuum gauges for use in accelerators have to cover about 17 decades of pressure, from 10–12 Pa to 105 Pa. In this article we describe the history, measurement mode, design, accuracy and calibration of the gauges used down to 10–5 Pa. We focus on commercially available types of gauges, i.e., mechanical gauges, piezoresistive and capacitance diaphragm gauges, thermal conductivity gauges, and spinning rotor gauges.