Basics and applications of cryopumps

This report introduces the wide field of cryogenic pumping, from commercial cryogen-free refrigerator cryopumps to very special, tailor-made cryopumps. It starts with a short historic overview of the field of cryopumping. Then, the principles of cryogenic pumping via sublimation/condensation and physisorption are introduced, and we illustrate how they are exploited to derive a design for a usable cryopump. In the third part, typical characteristics of cryosorption pumps are discussed. The report finishes with a few examples of applications.