VELO Module Production - Bare Hybrid Metrology

This note describes in detail the procedures for the metrology of the hybrids, from bare substrate stage through to their completion.

Detalles Bibliográficos
Autores principales: Turner, P R, Sinclair, P
Lenguaje:eng
Publicado: 2007
Materias:
Detectors and Experimental Techniques
Acceso en línea:http://cds.cern.ch/record/1067147
Descripción
Sumario:This note describes in detail the procedures for the metrology of the hybrids, from bare substrate stage through to their completion.

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