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VELO Module Production - Bare Hybrid Metrology
This note describes in detail the procedures for the metrology of the hybrids, from bare substrate stage through to their completion.
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
2007
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1067147 |