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Introduction to VLSI silicon devices: physics, technology and characterization
Autores principales: | , |
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Lenguaje: | eng |
Publicado: |
Kluwer
1986
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/107790 |
_version_ | 1780877683302858752 |
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author | El-Kareh, Auguste Badih Bombard, Richard J |
author_facet | El-Kareh, Auguste Badih Bombard, Richard J |
author_sort | El-Kareh, Auguste Badih |
collection | CERN |
id | cern-107790 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 1986 |
publisher | Kluwer |
record_format | invenio |
spelling | cern-1077902021-04-22T05:24:40Zhttp://cds.cern.ch/record/107790engEl-Kareh, Auguste BadihBombard, Richard JIntroduction to VLSI silicon devices: physics, technology and characterizationEngineeringKluweroai:cds.cern.ch:1077901986 |
spellingShingle | Engineering El-Kareh, Auguste Badih Bombard, Richard J Introduction to VLSI silicon devices: physics, technology and characterization |
title | Introduction to VLSI silicon devices: physics, technology and characterization |
title_full | Introduction to VLSI silicon devices: physics, technology and characterization |
title_fullStr | Introduction to VLSI silicon devices: physics, technology and characterization |
title_full_unstemmed | Introduction to VLSI silicon devices: physics, technology and characterization |
title_short | Introduction to VLSI silicon devices: physics, technology and characterization |
title_sort | introduction to vlsi silicon devices: physics, technology and characterization |
topic | Engineering |
url | http://cds.cern.ch/record/107790 |
work_keys_str_mv | AT elkarehaugustebadih introductiontovlsisilicondevicesphysicstechnologyandcharacterization AT bombardrichardj introductiontovlsisilicondevicesphysicstechnologyandcharacterization |