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Optical Inspection of Microsystems
| Autor principal: | |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Taylor and Francis
2006
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1085856 |
| _version_ | 1780913648424714240 |
|---|---|
| author | Osten Wolfgang |
| author_facet | Osten Wolfgang |
| author_sort | Osten Wolfgang |
| collection | CERN |
| id | cern-1085856 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2006 |
| publisher | Taylor and Francis |
| record_format | invenio |
| spelling | cern-10858562021-04-22T01:52:25Zhttp://cds.cern.ch/record/1085856engOsten WolfgangOptical Inspection of MicrosystemsEngineeringTaylor and Francisoai:cds.cern.ch:10858562006 |
| spellingShingle | Engineering Osten Wolfgang Optical Inspection of Microsystems |
| title | Optical Inspection of Microsystems |
| title_full | Optical Inspection of Microsystems |
| title_fullStr | Optical Inspection of Microsystems |
| title_full_unstemmed | Optical Inspection of Microsystems |
| title_short | Optical Inspection of Microsystems |
| title_sort | optical inspection of microsystems |
| topic | Engineering |
| url | http://cds.cern.ch/record/1085856 |
| work_keys_str_mv | AT ostenwolfgang opticalinspectionofmicrosystems |