Mechanics of microelectromechanical systems

This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the...

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Detalles Bibliográficos
Autores principales: Lobontiu, Nicolae, Garcia, Ephrahim
Lenguaje:eng
Publicado: Springer 2005
Materias:
Engineering
Acceso en línea:http://cds.cern.ch/record/1137947
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author Lobontiu, Nicolae
Garcia, Ephrahim
author_facet Lobontiu, Nicolae
Garcia, Ephrahim
author_sort Lobontiu, Nicolae
collection CERN
description This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of ME
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institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2005
publisher Springer
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spelling cern-11379472021-04-22T01:43:28Zhttp://cds.cern.ch/record/1137947engLobontiu, NicolaeGarcia, EphrahimMechanics of microelectromechanical systemsEngineeringThis book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the reversed functionality (as in sensors) and convert an external stimulus, such as mechanical motion, into (generally) electric energy. The impetus of this proposal stems from the perception that such an approach might contribute to a more solid understanding of the principles governing the mechanics of MESpringeroai:cds.cern.ch:11379472005
spellingShingle Engineering
Lobontiu, Nicolae
Garcia, Ephrahim
Mechanics of microelectromechanical systems
title Mechanics of microelectromechanical systems
title_full Mechanics of microelectromechanical systems
title_fullStr Mechanics of microelectromechanical systems
title_full_unstemmed Mechanics of microelectromechanical systems
title_short Mechanics of microelectromechanical systems
title_sort mechanics of microelectromechanical systems
topic Engineering
url http://cds.cern.ch/record/1137947
work_keys_str_mv AT lobontiunicolae mechanicsofmicroelectromechanicalsystems
AT garciaephrahim mechanicsofmicroelectromechanicalsystems

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