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Mechanics of microelectromechanical systems
This book offers a comprehensive coverage to the mechanics of microelectromechanical systems (MEMS), which are analyzed from a mechanical engineer's viewpoint as devices that transform an input form of energy into output mechanical motion (in the case of actuation) or that can operate with the...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Springer
2005
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1137947 |