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Fundamentals of semiconductor manufacturing and process control
A practical guide to semiconductor manufacturing from process control to yield modeling and experimental design Fundamentals of Semiconductor Manufacturing and Process Control covers all issues involved in manufacturing microelectronic devices and circuits, including fabrication sequences, process...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Wiley
2006
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1139910 |