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Symposium on Sputtering
| Autores principales: | , , , |
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| Lenguaje: | eng |
| Publicado: |
1987
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/114298 |
| _version_ | 1780878817326268416 |
|---|---|
| author | Betz, Gerhard Husinsky, Wolfgang Varga, Peter Viehböck, Franz |
| author_facet | Betz, Gerhard Husinsky, Wolfgang Varga, Peter Viehböck, Franz |
| author_sort | Betz, Gerhard |
| collection | CERN |
| id | cern-114298 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1987 |
| record_format | invenio |
| spelling | cern-1142982021-04-22T21:52:04Zhttp://cds.cern.ch/record/114298engBetz, GerhardHusinsky, WolfgangVarga, PeterViehböck, FranzSymposium on SputteringEngineeringoai:cds.cern.ch:1142981987 |
| spellingShingle | Engineering Betz, Gerhard Husinsky, Wolfgang Varga, Peter Viehböck, Franz Symposium on Sputtering |
| title | Symposium on Sputtering |
| title_full | Symposium on Sputtering |
| title_fullStr | Symposium on Sputtering |
| title_full_unstemmed | Symposium on Sputtering |
| title_short | Symposium on Sputtering |
| title_sort | symposium on sputtering |
| topic | Engineering |
| url | http://cds.cern.ch/record/114298 |
| work_keys_str_mv | AT betzgerhard symposiumonsputtering AT husinskywolfgang symposiumonsputtering AT vargapeter symposiumonsputtering AT viehbockfranz symposiumonsputtering |