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Workshop on Transferring X-ray Lithography Synchrotron (XLS) Technology to Industry

Detalles Bibliográficos
Autor principal:	Collective
Lenguaje:	eng
Publicado:	Brookhaven Nat. Lab. 1987
Materias:	Accelerators and Storage Rings
Acceso en línea:	http://cds.cern.ch/record/115425

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