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Ion beam studies ; 5, the computer simulation of composite ion implantation profiles
Autores principales: | , |
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Lenguaje: | eng |
Publicado: |
1977
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/117832 |
_version_ | 1780879077630017536 |
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author | Freeman, J H Booker, D V |
author_facet | Freeman, J H Booker, D V |
author_sort | Freeman, J H |
collection | CERN |
id | cern-117832 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 1977 |
record_format | invenio |
spelling | cern-1178322019-09-30T06:29:59Zhttp://cds.cern.ch/record/117832engFreeman, J HBooker, D VIon beam studies ; 5, the computer simulation of composite ion implantation profilesHealth Physics and Radiation EffectsAERE-R-8656oai:cds.cern.ch:1178321977 |
spellingShingle | Health Physics and Radiation Effects Freeman, J H Booker, D V Ion beam studies ; 5, the computer simulation of composite ion implantation profiles |
title | Ion beam studies ; 5, the computer simulation of composite ion implantation profiles |
title_full | Ion beam studies ; 5, the computer simulation of composite ion implantation profiles |
title_fullStr | Ion beam studies ; 5, the computer simulation of composite ion implantation profiles |
title_full_unstemmed | Ion beam studies ; 5, the computer simulation of composite ion implantation profiles |
title_short | Ion beam studies ; 5, the computer simulation of composite ion implantation profiles |
title_sort | ion beam studies ; 5, the computer simulation of composite ion implantation profiles |
topic | Health Physics and Radiation Effects |
url | http://cds.cern.ch/record/117832 |
work_keys_str_mv | AT freemanjh ionbeamstudies5thecomputersimulationofcompositeionimplantationprofiles AT bookerdv ionbeamstudies5thecomputersimulationofcompositeionimplantationprofiles |