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International Conference on Ion Implantation in Semiconductors
Autor principal: | |
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Lenguaje: | eng ger |
Publicado: |
Rossendorf Fachinformations-Zentrum. Zentral-Inst.
1978
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/119695 |
_version_ | 1780879160859688960 |
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author | Hohmuth, K |
author_facet | Hohmuth, K |
author_sort | Hohmuth, K |
collection | CERN |
id | cern-119695 |
institution | Organización Europea para la Investigación Nuclear |
language | eng ger |
publishDate | 1978 |
publisher | Rossendorf Fachinformations-Zentrum. Zentral-Inst. |
record_format | invenio |
spelling | cern-1196952021-04-22T21:50:48Zhttp://cds.cern.ch/record/119695enggerHohmuth, KInternational Conference on Ion Implantation in SemiconductorsInternational Conference on Ion Implantation in SemiconductorsOther Fields of PhysicsRossendorf Fachinformations-Zentrum. Zentral-Inst.ZFK-360ZFK-360-Aoai:cds.cern.ch:1196951978 |
spellingShingle | Other Fields of Physics Hohmuth, K International Conference on Ion Implantation in Semiconductors |
title | International Conference on Ion Implantation in Semiconductors |
title_full | International Conference on Ion Implantation in Semiconductors |
title_fullStr | International Conference on Ion Implantation in Semiconductors |
title_full_unstemmed | International Conference on Ion Implantation in Semiconductors |
title_short | International Conference on Ion Implantation in Semiconductors |
title_sort | international conference on ion implantation in semiconductors |
topic | Other Fields of Physics |
url | http://cds.cern.ch/record/119695 |
work_keys_str_mv | AT hohmuthk internationalconferenceonionimplantationinsemiconductors |