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Comments on stopping powers for calculations of range statistics in ion implantation applications
Autor principal: | |
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Lenguaje: | eng |
Publicado: |
1981
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Acceso en línea: | http://cds.cern.ch/record/129655 |
_version_ | 1780879344640458752 |
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author | Matthews, M D |
author_facet | Matthews, M D |
author_sort | Matthews, M D |
collection | CERN |
id | cern-129655 |
institution | Organización Europea para la Investigación Nuclear |
language | eng |
publishDate | 1981 |
record_format | invenio |
spelling | cern-1296552019-09-30T06:29:59Zhttp://cds.cern.ch/record/129655engMatthews, M DComments on stopping powers for calculations of range statistics in ion implantation applicationsOther Fields of PhysicsAERE-R-9883oai:cds.cern.ch:1296551981 |
spellingShingle | Other Fields of Physics Matthews, M D Comments on stopping powers for calculations of range statistics in ion implantation applications |
title | Comments on stopping powers for calculations of range statistics in ion implantation applications |
title_full | Comments on stopping powers for calculations of range statistics in ion implantation applications |
title_fullStr | Comments on stopping powers for calculations of range statistics in ion implantation applications |
title_full_unstemmed | Comments on stopping powers for calculations of range statistics in ion implantation applications |
title_short | Comments on stopping powers for calculations of range statistics in ion implantation applications |
title_sort | comments on stopping powers for calculations of range statistics in ion implantation applications |
topic | Other Fields of Physics |
url | http://cds.cern.ch/record/129655 |
work_keys_str_mv | AT matthewsmd commentsonstoppingpowersforcalculationsofrangestatisticsinionimplantationapplications |