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Comments on stopping powers for calculations of range statistics in ion implantation applications

Detalles Bibliográficos
Autor principal: Matthews, M D
Lenguaje:eng
Publicado: 1981
Materias:
Acceso en línea:http://cds.cern.ch/record/129655
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author Matthews, M D
author_facet Matthews, M D
author_sort Matthews, M D
collection CERN
id cern-129655
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 1981
record_format invenio
spelling cern-1296552019-09-30T06:29:59Zhttp://cds.cern.ch/record/129655engMatthews, M DComments on stopping powers for calculations of range statistics in ion implantation applicationsOther Fields of PhysicsAERE-R-9883oai:cds.cern.ch:1296551981
spellingShingle Other Fields of Physics
Matthews, M D
Comments on stopping powers for calculations of range statistics in ion implantation applications
title Comments on stopping powers for calculations of range statistics in ion implantation applications
title_full Comments on stopping powers for calculations of range statistics in ion implantation applications
title_fullStr Comments on stopping powers for calculations of range statistics in ion implantation applications
title_full_unstemmed Comments on stopping powers for calculations of range statistics in ion implantation applications
title_short Comments on stopping powers for calculations of range statistics in ion implantation applications
title_sort comments on stopping powers for calculations of range statistics in ion implantation applications
topic Other Fields of Physics
url http://cds.cern.ch/record/129655
work_keys_str_mv AT matthewsmd commentsonstoppingpowersforcalculationsofrangestatisticsinionimplantationapplications