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Micromechanical Photonics
The purpose of this book is to give the engineering student and the practical engineer a systematic introduction to optical MEMS (Micro electro mechanical systems) and micromechanical photonics through not only theoretical and experimental results, but also by describing various products and their f...
Autor principal: | Ukita, Hiroo |
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Lenguaje: | eng |
Publicado: |
Springer
2006
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1007/978-3-540-31372-4 http://cds.cern.ch/record/1339200 |
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