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NATO Advanced Research Workshop on Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators
The main goal of this book is to review recent progress and current status of MEMS/NEMS technologies and devices. Several important areas are discussed: history of research in the field, device physics, examples of sucessful applications, sensors, materials and processing aspects. The authors who ha...
| Autores principales: | , , |
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| Lenguaje: | eng |
| Publicado: |
Springer
2010
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| Acceso en línea: | https://dx.doi.org/10.1007/978-90-481-3807-4 http://cds.cern.ch/record/1339283 |