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Handbook of physical vapor deposition (PVD) processing
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
Elsevier
2010
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1344529 |
| _version_ | 1780922188935725056 |
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| author | Mattox, Donald M |
| author_facet | Mattox, Donald M |
| author_sort | Mattox, Donald M |
| collection | CERN |
| id | cern-1344529 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2010 |
| publisher | Elsevier |
| record_format | invenio |
| spelling | cern-13445292021-04-22T00:55:19Zhttp://cds.cern.ch/record/1344529engMattox, Donald MHandbook of physical vapor deposition (PVD) processingOther Fields of PhysicsElsevieroai:cds.cern.ch:13445292010 |
| spellingShingle | Other Fields of Physics Mattox, Donald M Handbook of physical vapor deposition (PVD) processing |
| title | Handbook of physical vapor deposition (PVD) processing |
| title_full | Handbook of physical vapor deposition (PVD) processing |
| title_fullStr | Handbook of physical vapor deposition (PVD) processing |
| title_full_unstemmed | Handbook of physical vapor deposition (PVD) processing |
| title_short | Handbook of physical vapor deposition (PVD) processing |
| title_sort | handbook of physical vapor deposition (pvd) processing |
| topic | Other Fields of Physics |
| url | http://cds.cern.ch/record/1344529 |
| work_keys_str_mv | AT mattoxdonaldm handbookofphysicalvapordepositionpvdprocessing |