Cargando…
Vortex Anemometer Using MEMS Cantilever Sensor
This paper presents construction and performance of a novel hybrid microelectromechanical system (MEMS) vortex flowmeter. A miniature cantilever MEMS displacement sensor was used to detect frequency of vortices development. 3-mm-long silicon cantilever, protruding directly out of a trailing edge of...
| Autores principales: | , , , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
2010
|
| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1109/JMEMS.2010.2079916 http://cds.cern.ch/record/1359273 |