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Physics of radio-frequency plasmas
Focussing on the physics of low-temperature radio frequency plasmas, for graduate students and researchers in applied physics and electrical engineering.
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Cambridge Univ. Press
2011
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1381182 |
| Sumario: | Focussing on the physics of low-temperature radio frequency plasmas, for graduate students and researchers in applied physics and electrical engineering. |
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