Cargando…
Physics of radio-frequency plasmas
Focussing on the physics of low-temperature radio frequency plasmas, for graduate students and researchers in applied physics and electrical engineering.
| Autores principales: | , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Cambridge Univ. Press
2011
|
| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1381182 |