IN-SITU EXPERIMENTS OF VACUUM DISCHARGE USING SCANNING ELECTRON MICROSCOPES

The fundamental understanding of vacuum discharge mechanisms and induced surface damage is indispensable for the CLIC feasibility study. We have been conducting dc sparc experiments inside a Scanning Electron Microscope (SEM) at Uppsala university in order to investigate localized breakdown phenomena. By using a SEM, we achieve the resolution of the electron probe in the few-nm range, which is of great advantage as the surface roughness of the polished accelerating structures is in the same scale. The high accelerating field of 1 GV/m is realized by biasing an electrode with 1 kV set above the sample with a gap of sub μm. Furthermore, a second SEM equipped with a Focused Ion Beam (FIB) is used to modify the topography of sample surfaces thus the geometrical dependence of field emissions and vacuum discharges can be studied. The FIB can be used for the surface damage analysis as well. We have demonstrated subsurface damage observations by using FIB to sputter a rectangular recess into the sample in the breakdown region. Those powerful surface analysis techniques can be productively applied to the study of fatigue in prototype accelerating structures as well.