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Comparison of impurity defect structures formed by ion implantations in amorphous and crystalline silicon
| Autores principales: | , , , |
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| Lenguaje: | eng |
| Publicado: |
1982
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1016/0167-5087(82)90250-2 http://cds.cern.ch/record/142454 |
| _version_ | 1780880114031001600 |
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| author | Weyer, G Damgaard, S Petersen, J W Heinemeier, J |
| author_facet | Weyer, G Damgaard, S Petersen, J W Heinemeier, J |
| author_sort | Weyer, G |
| collection | CERN |
| id | cern-142454 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1982 |
| record_format | invenio |
| spelling | cern-1424542019-09-30T06:29:59Zdoi:10.1016/0167-5087(82)90250-2http://cds.cern.ch/record/142454engWeyer, GDamgaard, SPetersen, J WHeinemeier, JComparison of impurity defect structures formed by ion implantations in amorphous and crystalline siliconOther Fields of Physicsoai:cds.cern.ch:1424541982 |
| spellingShingle | Other Fields of Physics Weyer, G Damgaard, S Petersen, J W Heinemeier, J Comparison of impurity defect structures formed by ion implantations in amorphous and crystalline silicon |
| title | Comparison of impurity defect structures formed by ion implantations in amorphous and crystalline silicon |
| title_full | Comparison of impurity defect structures formed by ion implantations in amorphous and crystalline silicon |
| title_fullStr | Comparison of impurity defect structures formed by ion implantations in amorphous and crystalline silicon |
| title_full_unstemmed | Comparison of impurity defect structures formed by ion implantations in amorphous and crystalline silicon |
| title_short | Comparison of impurity defect structures formed by ion implantations in amorphous and crystalline silicon |
| title_sort | comparison of impurity defect structures formed by ion implantations in amorphous and crystalline silicon |
| topic | Other Fields of Physics |
| url | https://dx.doi.org/10.1016/0167-5087(82)90250-2 http://cds.cern.ch/record/142454 |
| work_keys_str_mv | AT weyerg comparisonofimpuritydefectstructuresformedbyionimplantationsinamorphousandcrystallinesilicon AT damgaards comparisonofimpuritydefectstructuresformedbyionimplantationsinamorphousandcrystallinesilicon AT petersenjw comparisonofimpuritydefectstructuresformedbyionimplantationsinamorphousandcrystallinesilicon AT heinemeierj comparisonofimpuritydefectstructuresformedbyionimplantationsinamorphousandcrystallinesilicon |