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Micromechanics and MEMS: classic and seminal papers to 1990
| Autor principal: | |
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| Lenguaje: | eng |
| Publicado: |
IEEE Press
1997
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1480755 |
| _version_ | 1780925883016544256 |
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| author | Trimmer, W |
| author_facet | Trimmer, W |
| author_sort | Trimmer, W |
| collection | CERN |
| id | cern-1480755 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 1997 |
| publisher | IEEE Press |
| record_format | invenio |
| spelling | cern-14807552021-04-22T00:23:50Zhttp://cds.cern.ch/record/1480755engTrimmer, WMicromechanics and MEMS: classic and seminal papers to 1990EngineeringIEEE Pressoai:cds.cern.ch:14807551997 |
| spellingShingle | Engineering Trimmer, W Micromechanics and MEMS: classic and seminal papers to 1990 |
| title | Micromechanics and MEMS: classic and seminal papers to 1990 |
| title_full | Micromechanics and MEMS: classic and seminal papers to 1990 |
| title_fullStr | Micromechanics and MEMS: classic and seminal papers to 1990 |
| title_full_unstemmed | Micromechanics and MEMS: classic and seminal papers to 1990 |
| title_short | Micromechanics and MEMS: classic and seminal papers to 1990 |
| title_sort | micromechanics and mems: classic and seminal papers to 1990 |
| topic | Engineering |
| url | http://cds.cern.ch/record/1480755 |
| work_keys_str_mv | AT trimmerw micromechanicsandmemsclassicandseminalpapersto1990 |