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Principles of MEMS
| Autor principal: | |
|---|---|
| Lenguaje: | eng |
| Publicado: |
WILEY
2010
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1481015 |
| _version_ | 1780925937471193088 |
|---|---|
| author | Lee, Ki Bang |
| author_facet | Lee, Ki Bang |
| author_sort | Lee, Ki Bang |
| collection | CERN |
| id | cern-1481015 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2010 |
| publisher | WILEY |
| record_format | invenio |
| spelling | cern-14810152021-04-22T00:21:20Zhttp://cds.cern.ch/record/1481015engLee, Ki BangPrinciples of MEMSEngineeringWILEYoai:cds.cern.ch:14810152010 |
| spellingShingle | Engineering Lee, Ki Bang Principles of MEMS |
| title | Principles of MEMS |
| title_full | Principles of MEMS |
| title_fullStr | Principles of MEMS |
| title_full_unstemmed | Principles of MEMS |
| title_short | Principles of MEMS |
| title_sort | principles of mems |
| topic | Engineering |
| url | http://cds.cern.ch/record/1481015 |
| work_keys_str_mv | AT leekibang principlesofmems |