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Advanced Mechatronics and MEMS Devices
Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly...
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| Lenguaje: | eng |
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Springer
2013
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| Acceso en línea: | https://dx.doi.org/10.1007/978-1-4419-9985-6 http://cds.cern.ch/record/1500117 |