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Interfacial Compatibility in Microelectronics: Moving Away from the Trial and Error Approach
Interfaces between dissimilar materials are met everywhere in microelectronics and microsystems. In order to ensure faultless operation of these highly sophisticated structures, it is mandatory to have fundamental understanding of materials and their interactions in the system. In this difficult tas...
| Autores principales: | , , , , , |
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| Lenguaje: | eng |
| Publicado: |
Springer
2012
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| Materias: | |
| Acceso en línea: | https://dx.doi.org/10.1007/978-1-4471-2470-2 http://cds.cern.ch/record/1503663 |