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3D TCAD Simulation for Semiconductor Processes, Devices and Optoelectronics
Technology computer-aided design, or TCAD, is critical to today’s semiconductor technology and anybody working in this industry needs to know something about TCAD. This book is about how to use computer software to manufacture and test virtually semiconductor devices in 3D. It brings to life the t...
Autores principales: | Li, Simon, Fu, Yue |
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Lenguaje: | eng |
Publicado: |
Springer
2012
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1007/978-1-4614-0481-1 http://cds.cern.ch/record/1503715 |
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