RD on 3D Sensors and Micro‐Fabricated Detector Systems

The aim of this proposed R&D Collaboration is the design, fabrication and industrialization of a new generation of low mass detector systems based on silicon micro‐fabrication techniques. The main objective is the verification and validation of such systems for LHC detector upgrades. In particular, the collaboration would like to focus on the following research topics: • Novel 3D sensors layouts, with enhanced signal properties, high speed and active edges. • Integrated micro‐channel cooling for effective low mass module thermal management. • System integration and fully sensitive large area coverage.