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Lattice position and thermal stability of diluted As in Ge
We present a lattice location study of the n-type dopant arsenic after ion implantation into germanium. By means of electron emission channeling experiments, we have observed that the implanted As atoms substitute the Ge host atoms. However, in contrast to several implanted metal impurities in Ge, n...
Autores principales: | , , , , , , , |
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Lenguaje: | eng |
Publicado: |
2012
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/1524191 |