RD on 3D Sensors and MicroFabricated Systems

The aim of this proposed R&D Collaboration is the design, fabrication and industrialization of a new generation of low mass detector systems based on silicon micro-fabrication techniques. The main objective is the validation of such systems in HL-LHC detectors upgrades. In particular the collaboration would like to focus on the following research topics: • Novel 3D sensors layouts, with enhanced signal properties, high speed and active edges; •Integrated micro-channel cooling for effective low mass module thermal management; •System integration, simulation and reliability studies at experiments’ operational conditions.