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Computational lithography
| Autores principales: | , |
|---|---|
| Lenguaje: | eng |
| Publicado: |
Wiley
2010
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1555078 |
| _version_ | 1780930389879029760 |
|---|---|
| author | Ma, Xu Arce, Gonzalo R |
| author_facet | Ma, Xu Arce, Gonzalo R |
| author_sort | Ma, Xu |
| collection | CERN |
| id | cern-1555078 |
| institution | Organización Europea para la Investigación Nuclear |
| language | eng |
| publishDate | 2010 |
| publisher | Wiley |
| record_format | invenio |
| spelling | cern-15550782021-04-21T22:39:06Zhttp://cds.cern.ch/record/1555078engMa, XuArce, Gonzalo RComputational lithographyEngineeringWileyoai:cds.cern.ch:15550782010 |
| spellingShingle | Engineering Ma, Xu Arce, Gonzalo R Computational lithography |
| title | Computational lithography |
| title_full | Computational lithography |
| title_fullStr | Computational lithography |
| title_full_unstemmed | Computational lithography |
| title_short | Computational lithography |
| title_sort | computational lithography |
| topic | Engineering |
| url | http://cds.cern.ch/record/1555078 |
| work_keys_str_mv | AT maxu computationallithography AT arcegonzalor computationallithography |