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Ion beam assisted film growth
This volume provides up to date information on the experimental, theoretical and technological aspects of film growth assisted by ion beams.Ion beam assisted film growth is one of the most effective techniques in aiding the growth of high-quality thin solid films in a controlled way. Moreover, ion...
Autor principal: | Itoh, T |
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Lenguaje: | eng |
Publicado: |
Elsevier
2012
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Materias: | |
Acceso en línea: | http://cds.cern.ch/record/1601213 |
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