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MEMS sensors and Vertically Integrated Micro-Fabricated Systems
The aim of this addendum is to answer the questions raised by the LHCC committee.
| Autores principales: | , |
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| Publicado: |
2013
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| Materias: | |
| Acceso en línea: | http://cds.cern.ch/record/1602011 |
| _version_ | 1780931491450060800 |
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| author | Da Via, Cinzia Dalla Betta, Gianfranco |
| author_facet | Da Via, Cinzia Dalla Betta, Gianfranco |
| author_sort | Da Via, Cinzia |
| collection | CERN |
| description | The aim of this addendum is to answer the questions raised by the LHCC committee. |
| id | cern-1602011 |
| institution | Organización Europea para la Investigación Nuclear |
| publishDate | 2013 |
| record_format | invenio |
| spelling | cern-16020112019-09-30T06:29:59Zhttp://cds.cern.ch/record/1602011Da Via, CinziaDalla Betta, GianfrancoMEMS sensors and Vertically Integrated Micro-Fabricated Systems Detectors and Experimental TechniquesThe aim of this addendum is to answer the questions raised by the LHCC committee.CERN-LHCC-2013-016LHCC-I-026-ADD-1oai:cds.cern.ch:16020112013-09-19 |
| spellingShingle | Detectors and Experimental Techniques Da Via, Cinzia Dalla Betta, Gianfranco MEMS sensors and Vertically Integrated Micro-Fabricated Systems |
| title | MEMS sensors and Vertically Integrated Micro-Fabricated Systems |
| title_full | MEMS sensors and Vertically Integrated Micro-Fabricated Systems |
| title_fullStr | MEMS sensors and Vertically Integrated Micro-Fabricated Systems |
| title_full_unstemmed | MEMS sensors and Vertically Integrated Micro-Fabricated Systems |
| title_short | MEMS sensors and Vertically Integrated Micro-Fabricated Systems |
| title_sort | mems sensors and vertically integrated micro-fabricated systems |
| topic | Detectors and Experimental Techniques |
| url | http://cds.cern.ch/record/1602011 |
| work_keys_str_mv | AT daviacinzia memssensorsandverticallyintegratedmicrofabricatedsystems AT dallabettagianfranco memssensorsandverticallyintegratedmicrofabricatedsystems |