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MEMS sensors and Vertically Integrated Micro-Fabricated Systems

The aim of this addendum is to answer the questions raised by the LHCC committee.

Detalles Bibliográficos
Autores principales:	Da Via, Cinzia, Dalla Betta, Gianfranco
Publicado:	2013
Materias:	Detectors and Experimental Techniques
Acceso en línea:	http://cds.cern.ch/record/1602011

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