Cargando…

MEMS sensors and Vertically Integrated Micro-Fabricated Systems

The aim of this addendum is to answer the questions raised by the LHCC committee.

Detalles Bibliográficos
Autores principales:	Da Via, Cinzia, Dalla Betta, Gianfranco
Publicado:	2013
Materias:	Detectors and Experimental Techniques
Acceso en línea:	http://cds.cern.ch/record/1602011

Ejemplares similares

RD on 3D Sensors and Micro‐Fabricated Detector Systems
por: Da Via, C, et al.
Publicado: (2013)

3D sensors and micro-fabricated detector systems
por: Da Vià, Cinzia
Publicado: (2014)

RD on 3D Sensors and MicroFabricated Systems
por: Da Via, C
Publicado: (2013)

Characterization of proton irradiated 3D-DDTC pixel sensor prototypes fabricated at FBK
por: La Rosa, A., et al.
Publicado: (2011)

Micro-Fabricated Sensors
por: Da Via, Cinzia
Publicado: (2014)

Micro-Fabricated Sensors
por: DA VIÀ, Cinzia
Publicado: (2014)

Fabrication of PIN diode detectors on thinned silicon wafers
por: Ronchin, Sabina, et al.
Publicado: (2004)

Vortex Anemometer Using MEMS Cantilever Sensor
por: Zylka, P, et al.
Publicado: (2010)

3D active edge silicon sensors: Device processing, yield and QA for the ATLAS-IBL production
por: Da Via, Cinzia, et al.
Publicado: (2013)

A CMOS-MEMS Pixel Sensor for Thermal Neutron Imaging
por: Mendicino, Roberto, et al.
Publicado: (2023)

TCAD simulation of small-pitch 3D sensors for pixel detector upgrades at High Luminosity LHC
por: Boughedda, A, et al.
Publicado: (2021)

Radiation sensors with three-dimensional electrodes
por: Da Via, Cinzia, et al.
Publicado: (2019)

23rd International Workshop for Radiation Imaging Detectors
por: Dalla Betta, G-F
Publicado: (2022)

Fabrication of ATLAS pixel detector prototypes at IRST
por: Boscardin, M, et al.
Publicado: (2001)

First fabrication of full 3D-detectors at SINTEF
por: Hansen, Thor-Erik, et al.
Publicado: (2009)

Simulation of 3D pixel sensors cells
por: G.-F. Dalla Betta, et al.
Publicado: (2016)

Thin n-in-p pixel sensors and the SLID-ICV vertical integration technology for the ATLAS upgrade at the HL-LHC
por: Macchiolo, A., et al.
Publicado: (2012)

Beam Test Studies of 3D Pixel Sensors Irradiated Non-Uniformly for the ATLAS Forward Physics Detector
por: Grinstein, S., et al.
Publicado: (2013)

Micro-fabricated silicon devices for advanced thermal management and integration of particle tracking detectors
por: Romagnoli, Giulia
Publicado: (2016)

Application of Vertically Integrated Electronics to Intelligent Trackers
por: Lipton, Ronald
Publicado: (2010)

Performances of highly irradiated 3D and planar pixel sensors interconnected to the RD53A readout chip
por: Ceccarelli, Rudy, et al.
Publicado: (2019)

Recent developments in silicon radiation detectors at IRST
por: Pignatel, Giogrio Umberto, et al.
Publicado: (2000)

First fabrication of a silicon vertical JFET for power distribution in high energy physics applications
por: Fernández-Martínez, Pablo, et al.
Publicado: (2018)

Vertically Integrated System with Microfabricated 3D Sensors and CO$_2$ Microchannel Cooling
por: Da Via, Cinzia, et al.
Publicado: (2021)

LPNHE-FBK Thin n-on-p Pixel Sensors for HL-LHC Upgrade and Beyond
por: Calderini, G, et al.
Publicado: (2021)

3D silicon sensors: irradiation results
por: Dalla Betta, G-F, et al.
Publicado: (2014)

Active-edge FBK-INFN-LPNHE thin n-on-p pixel sensors for the upgrade of the ATLAS Inner Tracker
por: Calderini, G, et al.
Publicado: (2019)

Fabrication of MEMS Directional Acoustic Sensors for Underwater Operation
por: Espinoza, Alberto, et al.
Publicado: (2020)

Performance of new radiation tolerant thin n-in-p Silicon pixel sensors for the CMS experiment at High Luminosity LHC
por: Dalla Betta, G.F, et al.
Publicado: (2017)

A module concept for the upgrades of the ATLAS pixel system using the novel SLID-ICV vertical integration technology
por: Beimforde, M, et al.
Publicado: (2010)

Vertical Slice of the ATLAS Detector Control System
por: Boterenbrood, H, et al.
Publicado: (2001)

Fabrication and Characterization of a Micro Methanol Sensor Using the CMOS-MEMS Technique
por: Fong, Chien-Fu, et al.
Publicado: (2015)

Fabrication and Characterization of the Micro-Heater and Temperature Sensor for PolyMUMPs-Based MEMS Gas Sensor
por: Algamili, Abdullah S., et al.
Publicado: (2022)

Development of ALICE microstrip detectors at IRST
por: Boscardin, M, et al.
Publicado: (2001)

Beam Test Results of Thin n-in-p 3D and Planar Pixel Sensors for the High Luminosity LHC Tracker Upgrade at CMS
por: Zoi, Irene, et al.
Publicado: (2017)

R&D; for new silicon pixel sensors for the High Luminosity phase of the CMS experiment at LHC
por: Zuolo, D, et al.
Publicado: (2019)

MEMS μ-wire magnetic field detection method@CERN
por: Stifter, Michael, et al.
Publicado: (2016)

Development of new 3D pixel sensors for phase 2 upgrades at LHC
por: Dalla Betta, Gian-Franco, et al.
Publicado: (2016)

Design and Fabrication of Vertically-Integrated CMOS Image Sensors
por: Skorka, Orit, et al.
Publicado: (2011)

Measurement of the two track separation capability of hybrid pixel sensors
por: Muñoz, F J, et al.
Publicado: (2017)

Cannot write session to /tmp/vufind_sessions/sess_19g8r3f7b0j6252cj2q6vjhj88