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Plasma nanoscience
Filling the need for a single work specifically addressing how to use plasma for the fabrication of nanoscale structures, this book is the first to cover plasma deposition in sufficient depth.The author has worked with numerous R&D institutions around the world, and here he begins with an introd...
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| Lenguaje: | eng |
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Wiley
2008
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| Acceso en línea: | http://cds.cern.ch/record/1609963 |