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Introduction to microfabrication
This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer prob...
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| Lenguaje: | eng |
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Wiley
2010
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| Acceso en línea: | http://cds.cern.ch/record/1612572 |