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Laser precision microfabrication
Miniaturization and high precision are rapidly becoming a requirement for many industrial processes and products. As a result, there is greater interest in the use of laser microfabrication technology to achieve these goals. This book composed of 16 chapters covers all the topics of laser precision...
Autores principales: | Sugioka, Koji, Meunier, Michel, Pique, Alberto |
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Lenguaje: | eng |
Publicado: |
Springer
2010
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Materias: | |
Acceso en línea: | https://dx.doi.org/10.1007/978-3-642-10523-4 http://cds.cern.ch/record/1612684 |
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