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Microelectronic test structures for CMOS technology

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has...

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Detalles Bibliográficos
Autores principales: Ketchen, Mark B, Bhushan, Manjul
Lenguaje:eng
Publicado: Springer 2011
Materias:
Acceso en línea:http://cds.cern.ch/record/1613752
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author Ketchen, Mark B
Bhushan, Manjul
author_facet Ketchen, Mark B
Bhushan, Manjul
author_sort Ketchen, Mark B
collection CERN
description Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has become ever more important with the increased cost and complexity of development and manufacturing. In this timely volume, IBM scientists Manjul Bhushan and Mark Ketchen emphasize high speed characterization techniques for digital CMOS circuit applications and bridging between circuit performance an
id cern-1613752
institution Organización Europea para la Investigación Nuclear
language eng
publishDate 2011
publisher Springer
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spelling cern-16137522021-04-21T22:10:57Zhttp://cds.cern.ch/record/1613752engKetchen, Mark BBhushan, ManjulMicroelectronic test structures for CMOS technologyEngineeringMicroelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has become ever more important with the increased cost and complexity of development and manufacturing. In this timely volume, IBM scientists Manjul Bhushan and Mark Ketchen emphasize high speed characterization techniques for digital CMOS circuit applications and bridging between circuit performance anSpringeroai:cds.cern.ch:16137522011
spellingShingle Engineering
Ketchen, Mark B
Bhushan, Manjul
Microelectronic test structures for CMOS technology
title Microelectronic test structures for CMOS technology
title_full Microelectronic test structures for CMOS technology
title_fullStr Microelectronic test structures for CMOS technology
title_full_unstemmed Microelectronic test structures for CMOS technology
title_short Microelectronic test structures for CMOS technology
title_sort microelectronic test structures for cmos technology
topic Engineering
url http://cds.cern.ch/record/1613752
work_keys_str_mv AT ketchenmarkb microelectronicteststructuresforcmostechnology
AT bhushanmanjul microelectronicteststructuresforcmostechnology