Microelectronic test structures for CMOS technology

Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has...

Descripción completa

Detalles Bibliográficos
Autores principales: Ketchen, Mark B, Bhushan, Manjul
Lenguaje:eng
Publicado: Springer 2011
Materias:
Engineering
Acceso en línea:http://cds.cern.ch/record/1613752

Internet

http://cds.cern.ch/record/1613752

Ejemplares similares