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Microelectronic test structures for CMOS technology
Microelectronic Test Structures for CMOS Technology and Products addresses the basic concepts of the design of test structures for incorporation within test-vehicles, scribe-lines, and CMOS products. The role of test structures in the development and monitoring of CMOS technologies and products has...
| Autores principales: | , |
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| Lenguaje: | eng |
| Publicado: |
Springer
2011
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| Acceso en línea: | http://cds.cern.ch/record/1613752 |